3自由度混合柔性铰链微定位平台的设计与分析

摘要

为了提高3自由度并联微定位平台的性能,研究了一种新型的混合柔性铰链微定位平台,它由正圆柔性铰链和直角柔性铰链组成.根据正圆柔性铰链和直角柔性铰链的不同特性,设计出了新型的混合柔性铰链微定位平台.先建立传统的3-RRR柔性铰链微定位平台和新型的混合柔性铰链微定位平台模型.再通过有限元分析软件,比较了新型混合柔性铰链微定位平台和传统的3-RRR柔性铰链微定位平台的柔度和灵敏性.结果表明,混合型柔性铰链微定位平台较传统的3-RRR柔性铰链微定位平台有更好的性能.%In order to improve the performance of Three Degree of Freedom(3-DOF)parallel micro positioning stage, a new type hybrid flexure hinge micro positioning stage is studied.It was composed of circular flexure hinge and right angle flexible hinge.Ac-cording to the different characteristics of circular flexure hinge and right angle flexible hinge,a new type hybrid flexure hinge micro po-sitioning stage was designed.Firstly the model of the traditional 3-RRR flexible hinge micro positioning stage and new hybrid flexure hinge micro positioning stage was established.Then through the Finite Element Analysis(FEA)software,the flexibility and agility of the new hybrid flexure hinge micro positioning stage and the traditional 3-RRR flexure hinge micro positioning stage were compared. The results show that the hybrid flexure hinge micro positioning stage has a better performance than the traditional 3-RRR flexure hinge micro positioning stage.