STOCHASTIC ANALYSIS OF A NONLINEAR MEMS FORCE SENSOR

摘要

In this paper, a sensing technique, based on the detection of Hopf bifurcation in the dynamic of a micro-bridge, is proposed. The governing equations of motion are derived, which take into account the fringe and large deflection effects. Moreover, a stochastic analysis approach is proposed for investigating the reliability of the sensor readings. It has been demonstrated that sensitivity of more than 2mV/fiN is achievable with this sensing technique.