EFFECTIVE FEEDFORWARD/FEEDBACK CONTROLLER DESIGN WITH COMMAND SHAPING TO REDUCE RESIDUAL VIBRATION

摘要

Many manufacturing devices must execute motions as quickly as possible to achieve profitable high-volume production. This paper develops a control strategy that combines feedforward and feedback control with command shaping. First, the feedback controller is designed to increase damping and eliminate steady-state error. Next, the feedforward controller is designed to speed up the transient response. Finally, an appropriate reference profile is generated using command-shaping techniques to ensure fast point-to-point motions with minimum residual vibration. The particular focus of the paper is to understand the interactions between these individual control components. The resulting control strategy is demonstrated on a model of a high-speed semiconductor manufacturing machine.