A STRUCTURE OF BISTABLE ELECTROMAGNETIC ACTUATED MICROVALVE FABRICATED ON A SINGLE WAFER, IMPLEMENTING THE SLA AND PDMS TECHNIQUE

摘要

This report presents a complete package for bistable electromagnetic actuated microvalve. The function of the valve is to control the fuel delivery system in a fuel cell unit for power generation. The microvalves were fabricated on top of a single wafer using 8 masking steps. The fabrication processes have a maximum processing temperature of 300℃, providing potentially a CMOS compatible process. The valve arrays that compromise of 12 valves per 12 MM x 12 MM chip are built completely by surface micromachining. The chip is assembled into a package with fluidic connection parts. The parts were made from the stereo lithography (SLA) frame that was filled with PDMS. The PDMS also acts as a gasket to seal the microvalve from leaking. The fluidic tests show that the whole valve assembly can stand from leaks up to the pressure of 57.4 kPa.