This paper presents miniature (diameter less than 1.5 mm) corrugated parylene/Cr/parylene diaphragms that provide ultra sensitive load-deflection (+-100 μm for +-1kPa) and reflective surface for optical sensing. The design, fabrication, and test results of the ultra low pressure transducer for biomedical applications are reported here. The diaphragms have been attached to stainless steel tubes that are suitable for most endoscopes.
展开▼
