The Current State and Development Trends of Deterministic Ultraprecision Optical Surfaces Machining Technology

摘要

The deterministic ultraprecision machining achieves accuracy and repeatability not possible using conventional optical machining techniques, greatly enhances product quality, providing a quantum leap in throughput, productivity, yield, and cost effectiveness. The deterministic ultraprecision machining technology, involving various ultraprecision process from turning, flycutting, grinding and polishing to finishing, is usually referred to the following technologies such as single point diamond turning (SPDT), deterministic microgrinding (DMG), magneto-rheological finishing (MRF),computer controlled polishing (CCP), and computer controlled optical surfacing(CCOS),etc. This paper discusses mainly the current state and development trends of the deterministic ultraprecision machining technologies at home and abroad. In addition, the paper also elaborates on the technical features of the various deterministic machining technologies mentioned.