Design and fabrication of pitch tunable blaze grating

摘要

A novel microelectromechanical grating with both pitch and blaze angle tuning functions has been designed,rnsimulated, and fabricated and is reported in this paper. This grating device could change spectrum angle throughrnadjusting grating pitch and make reflection match with a particular diffraction order by the blaze angle tuning. Thisrngrating could have better dispersion efficiency than most previous tunable gratings because of its small grating pitch.rnBesides, the reflective surfaces of our MEMS grating are constructed by surface-micromachining aluminum to get highrnreflective efficiency. For wide tuning range, this grating uses bulk actuators to provide large displacement of aboutrn70um for tuning more than 1/10 of original pitch length. All tuning functions are operated by electrostatic force with arndriving voltage below 120V.