Development of 3D-Stacked Multi-Shank Si Neural Probe Array (1)：Fabrication of Embedded Multiple Optical Fibers in Multi-Shank

摘要

Many researches have been developingmedical treatments for brain diseases, analyzingbrain functions, and so on. Then, various kinds ofneural probes were developed and used forrecording neuronal action potentials and otherbrain activities. Especially, a Si neural probe isone of the most important tools to analyze brainfunctions [1].