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Reduced recombination losses for PERC cell using a selective emitter structure formed by screen-printed resist masking combined with etch-back process

机译:通过使用丝网印刷的抗蚀剂掩膜和回蚀工艺形成的选择性发射极结构,减少了PERC电池的重组损失

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We present the improvement of the p-type passivated emitter and rear cell (PERC) with a selective emitter (SE) structure using screen-printed resist masking combined with wet chemical etch-back process. The structure of SE PERC solar cell is displayed in Fig. 1. The concept of an SE structure is based on removal of the highly doped layers (n~(++)) in the areas not intended for metallization. For p-type solar cells, the lightly doped emitter areas (n~+) obtained by the above mentioned process lead to a reduced Auger recombination and Shockley-Read-Hall (SRH) recombination, thereby improving the performance of PERCs. An n~+ emitter by etch-back process showing high sheet resistance (R_(sheet)) ensures a better blue response, resulting in high internal quantum efficiency.
机译:我们提出了使用丝网印刷的抗蚀剂掩膜结合湿法化学回蚀工艺的具有选择性发射极(SE)结构的p型钝化发射极和后电池(PERC)的改进。 SE PERC太阳能电池的结构如图1所示。SE结构的概念基于去除非金属化区域中的高掺杂层(n〜(++))。对于p型太阳能电池,通过上述工艺获得的轻掺杂发射极面积(n〜+)导致俄歇复合体和肖克利-雷霍尔(SRH)复合体的减少,从而提高了PERC的性能。通过回蚀工艺显示的n〜+发射极具有高的薄层电阻(R_(sheet)),可确保更好的蓝光响应,从而提高内部量子效率。

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