Preparation of Composite Spherical Alumina Nanoparticles and Study on Their CMP Performance

摘要

The properties of abrasive have significant influences on the surface qualities of glass substrate,hard disk,etc[1].During the chemical mechanical planarization (CMP) process.α-Al2O3 particles,as one of the most widely used abrasives in CMP slurries,often cause great surface defects because of its high hardness and unfeasible control of agglomeration during synthesizing[2,3].In this paper,spherical nanocomposite alumina powders with particle size of 10-50nm was prepared via a homogeneous precipitation method.The structures and surface morphologies of the alumina nanopowders are characterized by means of X-ray diffraction (XRD),particle size analysis and scanning electron microscope (SEM) and atomic force microscope(AFM).The results showed that the as-obtained nanoparticles compose of both alpha and theta phase alumina,which has a small particle size and narrow size distributions.The CMP investigations on glass substrate showed that the nanocomposite alumina abrasives exhibit a better surface planarization performance than pure single phase α-Al2O3 nanopowders,with lower surface roughnesses and less scratches after CMP process.The results indicated that the current processing for the synthesis of nanocomposite Al2O3 powders were of great potentials for practical applications of Al2O3 based abrasive.