A STUDY ON SURFACE MATERIAL MEASURES FOR AREAL SURFACE TEXTURE MEASURING INSTRUMENTS

摘要

We applied the 2D A-R model to the generation of software gauge data for the surface material measure which can be used to verify the overall performances of 3D surface texture measuring instruments. And material measure was manufactured using a super 5-axis nano machine. The following concluding remarks were obtained. (1) The evaluation area is defined as 768μm × 768μm. And the area which combined four evaluation areas is defined as multiple sampling areas (1,536μm ×1,536μm).(2) By measuring the area of 16 times or more on the correlation length, the influence of measurement area on the roughness parameters becomes 5% or less. And the optimal sampling distance is 10μm or less. (3) The material measure with Sa:0.788μm was manufactured. This material measure can be used for various 3D surface texture measuring instruments.