A PLANAR NANO-POSITIONING TABLE SYSTEM FOR ADVANCED MACHINE TOOLS

摘要

This paper presented the developed planar nano-positioning table system based on a new design concept. The developed system was designed to minimize the structural and kinetic errors. The performance was verified through actual driving experiments. The evaluated results showed that the developed table system has superior fundamental characteristics for nano-positioning capability. The developed table system can be applied to advanced machine tools, such as ultraprecision milling machines, micro EDM machines, etc.