A MODEL FOR THE ELECTRICAL DEGRADATION OF METAL MICROCONTACTS DURING MANY-CYCLE OPERATION

摘要

A model for the electrical degradation of MEMS switch metal microcontacts under many-cycle operation is presented. This model utilizes an asperity-based description of contacts and a general model for the degradation evolution. Calculations of switch resistance using this model predict a resistance evolution that shows good qualitative agreement with measurements. Implications of this model are discussed.