Actuation Principles for Hybrid Two-Dimensional Quasistatic Micro Scanning Mirrors

摘要

In this article a numerical approach for a hybrid actuated two-dimensional micro scanner with largernaperture is presented for applications like 3D distance measurement and high power laser applicationsrnlike laser material treatment or medical laser surgery. No micromachined mirror with large aperturern(>?6 mm) and large quasistatic deflection (>2°) is known. Only fine mechanically fabricated scannersrnreach large deflection angels with, in comparison to micromirrors, huge aperture [1, 2]. Our approach is,rnto combine a micromachined structure with an external actuator. To be able to choose the best suitablernactuator, an analytical design model was developed. Optimizations of a magnetic actuator guiding thernmagnetic flux are presented and evaluated experimentally with a gimbal micromirror with 6mm u0002 8mmrnmirror plate. Static deflections of 3° were reached.