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Precise shape measurements of rotating workpieces by a single optical sensor

机译:单个光学传感器精确测量旋转工件的形状

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The precise measurement of the shape of fast rotating workpieces is important at several applicationsrnsuch as lathe monitoring. For such tasks the laser Doppler distance sensor technique was invented byrnthe TU Dresden some years ago. This technique has been realized by two mutually tilted interferencernfringe systems, where the distance is coded in the phase difference between the generatedrninterference signals of two photo detectors. However, due to the speckle effect at rough surfaces,rnrandom envelopes and phase jumps occur disturbing the phase difference estimation. Recently arnscientific breakthrough for the measurement uncertainty budget has been achieved. Via illuminationrnand receiving optics matching the uncertainty of the measurement uncertainty was reduced by aboutrnone magnitude. For displacement measurements of a recurring rough surface an uncertainty of 110rnnm were attained. It enables precise shape measurements, since the lateral velocity and the rotationalrnspeed of rotating objects are determined additionally. This novel sensor technique can bernadvantageously used for the quality control of workpieces inside of a lathe towards the reduction ofrnprocess tolerances, installation times and costs.
机译:快速旋转的工件形状的精确测量在车床监控等多种应用中很重要。激光多普勒距离传感器技术是几年前由德累斯顿工业大学发明的。该技术已经通过两个相互倾斜的干涉条纹系统实现,其中距离被编码为两个光电检测器产生的干涉信号之间的相位差。然而,由于粗糙表面上的斑点效应,出现了随机包络和相位跳变,干扰了相位差估计。最近,在测量不确定性预算方面取得了科学突破。通过照明和与接收光学器件匹配的测量不确定度,将不确定度降低了大约一个数量级。对于重复出现的粗糙表面的位移测量,不确定度为110nm。由于可以额外确定旋转物体的横向速度和旋转速度,因此可以进行精确的形状测量。这种新颖的传感器技术可以有利地用于车床内部工件的质量控制,以减少工艺公差,安装时间和成本。

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