Asahi Kasei E-Materials Co., Shizuoka, Japan,Materials Research Laboratory, University of California, Santa Barbara, CA 93106;
Materials Research Laboratory, University of California, Santa Barbara, CA 93106;
Materials Research Laboratory, University of California, Santa Barbara, CA 93106;
Materials Research Laboratory, University of California, Santa Barbara, CA 93106;
Materials Research Laboratory, University of California, Santa Barbara, CA 93106;
Directed self-assembly; shape rectification; self-consistent field theory; VIA lithography; contact holes; hole shrink; overlapped cylinders;
机译:定向自组装过程开发的计算机模拟和参数研究以及逆向自组装问题的解决方案
机译:有向自组装的接触孔收缩与倍增的计算研究
机译:石墨外延节距倍增应用的中性预设定向自组装的计算研究
机译:圆柱约束中定向自组装的场论模拟:布置和整流方面
机译:先进光刻的嵌段共聚物定向自组装的计算研究。
机译:将纳米铃的形状定向自组装成超大结构多晶型物
机译:将纳米铃的形状定向自组装成超大结构多晶型物