Advanced Lithography Department, ATD Advanced Modules. United Microelectronics Corporation, Tainan County 744, Taiwan, ROC;
Advanced Lithography Department, ATD Advanced Modules. United Microelectronics Corporation, Tainan County 744, Taiwan, ROC;
Advanced Lithography Department, ATD Advanced Modules. United Microelectronics Corporation, Tainan County 744, Taiwan, ROC;
Advanced Lithography Department, ATD Advanced Modules. United Microelectronics Corporation, Tainan County 744, Taiwan, ROC;
Advanced Lithography Department, ATD Advanced Modules. United Microelectronics Corporation, Tainan County 744, Taiwan, ROC;
Advanced Lithography Department, ATD Advanced Modules. United Microelectronics Corporation, Tainan County 744, Taiwan, ROC;
Advanced Lithography Department, ATD Advanced Modules. United;
implant; KrF resist; lithography; topography; footing;
机译:优化抗蚀剂参数以改善高级节点中接触图案的轮廓和工艺窗口
机译:高级FEOL节点的抗蚀剂剥离:使用添加剂改进基于臭氧扩散的工艺
机译:使用KRF激光烧蚀过程抵抗图案化特性
机译:KRF抵抗高级节点的植入层的抵抗力和过程
机译:利用先进的Crism数据处理技术对火星上分层硫酸盐沉积物的光谱和地层映射
机译:通过批量原子层沉积处理的基于HfO2的集成式1晶体管1电阻阻性随机存取存储器的材料见解
机译:设计高性能KRF和ARF单层用甲基丙烯酸酯聚合物抵抗。
机译:高级Hg(1) - (x)Cd(x)Te EpI层中的直接注入工艺开发和表征。