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Comparison of slope and height profiles for flat synchrotron x-ray mirrors measured with a long trace profiler and a PMI Fizeau interferometer

【摘要】 Long trace profilers (LTPs) have been used at many synchrotron radiation laboratories worldwide for over a decade to measure surface slope profiles of long grazing incidence x-ray mirrors. Phase measuring interferometers (PMls) of the Fizeau type, on the other hand, are being used by most mirror manufacturers to accomplish the same task. However, large mirrors whose dimensions exceed the aperture of the Fizeau interferometer require measurements to be carried out at grazing incidence, and aspheric optics require the use of a null lens. While an LTP provides a direct measurement of ID slope profiles, PMIs measure area height profiles from which the slope can be obtained by a differentiation algorithm. Measurements of the two types of instruments have been found by us to be in good agreement, but to our knowledge there is no published work directly comparing the two instruments. This paper documents that comparison. We measured two different nominally flat mirrors with both the LTP in operation at the Advanced Photon Source (a type-II LTP) and a Fizeau-type PMI interferometer (Wyko model 6000). One mirror was 500 mm long and made of Zerodur, and the other mirror was 350 mm long and made of silicon. Slope error results with these instruments agree within nearly 100% (3.11±0.15 urad for the LTP, and 3.11±0.02 urad for the Fizeau PMI interferometer) for the medium quality Zerodur mirror with 3 urad μrms nominal slope error. A significant difference was observed with the much higher quality silicon mirror. For the Si mirror, slope error data is 0.39±0.08 μrad from LTP measurements but it is 0.35 ± 0.01 μrad from PMI interferometer measurements. The standard deviations show that the Fizeau PMI interferometer has much better measurement repeatability.

【会议名称】 Advances in Metrology for X-Ray and EUV Optics II; Proceedings of SPIE-The International Society for Optical Engineering; vol.6704

【会议地点】San DiegoCA(US)

【作者】 Jun Qian; Lahsen Assoufid; Albert Macrer;

【作者单位】 Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439;

【会议组织】

【会议召开年】 2007

【页码】P.11.1-11.7

【总页数】7

【原文格式】PDF

【正文语种】eng

【中图分类】TH741;

【关键词】long trace profiler;LTP;phase measuring interferometer;PMI;Fizeau interferometer;synchrotron x-ray mirror;

【原文服务方】国家工程技术数字图书馆

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