Growth kinetics and modeling of direct oxynitride growth with no-o2 gas mixtures

摘要

We have modeled growth kinetics of oxynitrides grown in NO-O_2 gas mixtures from first principles using modified Deal-Grove equations. Retardation of oxygen diffusion through the nitrided dielectric was assumed to be the dominant growth-limiting step. The model was validated against experimentally obtained curves with good agreement. Excellent uniformity, which exceeded expected values, was observed.