Growth Kinetics and Modeling of Direct Oxynitride Growth with NO-O2 Gas Mixtures

摘要

We have modeled growth kinetics of oxynitrides grown in NO-O<sub>2</ sub> gas mixtures from first principles using modified Deal-Grove equations. Retardation of oxygen diffusion through the nitrided dielectric was assumed to be the dominant growth-limiting step. The model was validated against experimentally obtained curves with good agreement. Excellent uniformity, which exceeded expected walues, was observed.