AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
AZ Electronic Materials Manufacturing (Japan) K.K., 3330 Chihama, Kakegawa, Shizuoka, Japan, 437-1412, JP AZ Electronic Materials, 70 Meister Avenue, Somerville, NJ 08876, USA;
shot noise; contact hole patterning; EUV lithography; EUV Underlayer; Metal hard mask; buffer component; back exposure effect; local CD uniformity;
机译:衰减相移掩模,用于缓解极端紫外光刻中接触孔图案中的光子散粒噪声效应
机译:EUV图案化策略可补偿EUV散粒噪声
机译:EUV图案化策略可补偿EUV散粒噪声
机译:通过在密集的接触孔阵列图案上进行蚀刻来实现EUV随机噪声分析和LCDU缓解
机译:环境在润滑滑动触点中形成和消除摩擦和减磨表面膜的作用:一种系统方法
机译:使用牺牲性纳米颗粒消除散粒噪声的影响电子束光刻制造的接触孔中的孔
机译:通过空间信号减轻内容传递网络中的干扰 对齐:射击噪声比的方法
机译:碱性和paG对EUV光刻胶脱保护模糊的影响及对噪声的一些思考