Design Calculation of Micro-displacement Amplifier Mechanism Based on Bridge Flexure Hinge

摘要

According to the microstructure characteristics of the optical components surface, the paper designs a bridge right-angle flexure hinge driven by a piezoelectric ceramic. It meets the driving micro-displacement magnification requirements and solves the coupling problem in work. Using the calculation formulas of statics and calculation formula of bending moment, the thesis explores the motion law of piezoelectric ceramics with 1 KHZ excitation frequency. Through the exploration of the factors of bridge flexure hinge angle stiffness and tensile stiffness, the mathematical model of input displacement and output displacement is established. Studying the theory about the elimination of motion process coupling, it excavates the function relationships of flexure hinge angle and magnification. And the relationship is unearthed among driving force of piezoelectric ceramic, the flexure hinge stiffness, cutting force and mass of cutter system. The paper establishes their mathematical model between the above elements and the output micro-displacement, and the theoretical result is calculated by Matlab. Finally, using Pro/Engineer 3D digital modeling and analysis of simulation results by Ansys, it is found that the error can be controlled in an acceptable range by comparing the theoretical results with simulation results. Through the above analysis, the theoretical design is found to be reliable and effective.