Study on Radius of Curvature Measurement System by Interferometry

摘要

This paper deigns a new ROC measurement system for radius of curvature of spherical surface measurement base on interferometry. The ROC measurement system is designed compactly and continently to use. The ROC measurement range is up to 2000mm, and DIA of the spherical surface is range from 100mm to 300mm. We analyze the uncertainty sources of the ROC measurement system results and calculate combined standard uncertainty. Giving out the experiment results, the relative uncertainty is less than 6.9ppm (ROC～1500mm). By discussing the method, we can improve and reduce the uncertainty of results of ROC measurement system.