Large radius of curvature measurement based on the evaluation of interferogram-quality metric in non-null interferometry

摘要

Non-null interferometry could use to measure the radius of curvature (ROC), we have presented a virtual quadratic Newton rings phase-shifting moire-fringes measurement method for large ROC measurement (Yang et al., 2016). In this paper, we propose a large ROC measurement method based on the evaluation of the interferogram-quality metric by the non-null interferometer. With the multi-configuration model of the nonnull interferometric system in ZEMAX, the retrace errors and the phase introduced by the test surface are reconstructed. The interferogram-quality metric is obtained by the normalized phase-shifted testing Newton rings with the spherical surface model in the non-null interferometric system. The radius curvature of the test spherical surface can be obtained until the minimum of the interferogram-quality metric is found. Simulations and experimental results are verified the feasibility of our proposed method. For a spherical mirror with a ROC of 41,400 mm, the measurement accuracy is better than 0.13%. (C) 2017 Elsevier B.V. All rights reserved.