Radius of curvature measurement of spherical smooth surfaces by multiple-beam interferometry in reflection

摘要

In this paper a method is presented to accurately measure the radius of curvature of different types of curved surfaces of different radii of curvatures of 38000,18 000 and 8000 mm using multiple-beam interference fringes in reflection. The images captured by the digital detector were corrected by flat fielding method. The corrected images were analyzed and the form of the surfaces was obtained. A 3D profile for the three types of surfaces was obtained using Zernike polynomial fitting. Some sources of uncertainty in measurement were calculated by means of ray tracing simulations and the uncertainty budget was estimated within λ/40.