SIMULATION OF A MICRO COORDINATE MEASURING MACHINE FOR PARALLEL MEASUREMENT OF MICROSTRUCTURES

摘要

The measurement of microstructures brings up new requirements which are only partially met by the optical sensors currently in use. A new micro coordinate measuring machine, which features micro sized probes and parallel probing, is tailored this way for the needs of measuring microstructures. In particular the parallel probing brings up some challenges, e.g. the need for probing strategies, and some questions, the unknown measurement uncertainty, which can be answered by means of computer based simulation. The micro coordinate measuring machine along with the simulation environment will be introduced. The probing strategies tested with the simulation environment will be presented as well as the Monte Carlo Simulations done with the simulation environment.