Experimental Study on Micro-deliquescence Ultra-precision Polishing with Fine Water Mist for KDP Crystal

摘要

KDP crystal (Potassium dihydrogen phosphate single crystal) is extremely difficult to obtain flawless surface because of its soft,brittle,and hygroscopic.And a large amount of time has been spend on obtaining flawless surface with ultra-precision machining methods.In order to quickly reduce surface roughness on KDP crystal,a new micro-deliquescence polishing method with fine water mist was proposed,the polishing tool with fine water mist was designed,and the polishing experiment was carried out.The micro-deliquescence polishing with fine water mist can improve the surface quality of KDP crystal quickly,so it is an effective preprocessing before ultra-precision machining.