Software reliability qualification for semi-conductor manufacturing systems

机译：半导体制造系统的软件可靠性鉴定

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The duration of the reliability qualification test for a new software release at ASML is derived from the SEMI-E10 standard. A system level ''run production'' test case is used for qualification, even if specific sub-system test cases could reach the targ

机译：ASML上的新软件版本的可靠性鉴定测试的持续时间源自SEMI-E10标准。即使特定的子系统测试用例可能达到目标水平，也要使用系统级的“运行生产”测试用例进行资格鉴定

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《Advanced Semiconductor Manufacturing Conference, 2007 IEEE/SEMI》|2007年|P.326-332|共7页
会议地点 StresaItaly
作者
de Jong; I.S.M.; Boumen; R.; van de Mortel-Fronczak; J.M.; Rooda; J.E.;
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maintenance engineering; manufacturing systems; semiconductor device manufacture; software reliability; standards; ASML; SEMI-E10 standard; reliability engineering; semiconductor manufacturing systems; software reliability qualification; system level run productio;

机译：维修工程；制造系统；半导体器件制造；软件可靠性；标准; ASML； SEMI-E10标准；可靠性工程；半导体制造系统；软件可靠性鉴定；系统级运行产量;

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Software reliability qualification for semi-conductor manufacturing systems

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