Novel, Sem-Based Method for Wafer Inspection Recipe Optimization

机译：基于Sem的晶圆检测配方优化新方法

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This paper describes a novel route to brightfield (BF) wafer inspector recipe setup leading to substantially shortened recipe setup time and improved recipe quality. The traditional BF recipe optimization process involves adjusting several inspection para

机译：本文介绍了一种通往明场（BF）晶圆检查器配方设置的新颖方法，该方法可大大缩短配方设置时间并提高配方质量。传统的高炉配方优化过程涉及调整多个检查参数

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来源
《Advanced Semiconductor Manufacturing Conference, 2007 IEEE/SEMI》|2007年|P.195-200|共6页
会议地点 StresaItaly
作者
Stamper; A.; Sang Chong; Nafisi; K.; Feichtinger; P.; Wee Teck Chia; Randall; D.; Khullar; A.;
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inspection; integrated circuit testing; integrated circuit yield; iterative methods; optimisation; scanning electron microscopy; IC fabrication; IC production; SEM-based method; brightfield inspection; cycle time reduction; multiple iterations; signal-to-noise ratio;

机译：检查;集成电路测试；集成电路成品率；迭代方法；优化;扫描电子显微镜; IC制造；集成电路生产；基于SEM的方法；明场检查；减少循环时间；多次迭代；信噪比;

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2. Throughput improvement by recipe routing optimization for metrology inspection tools [J] . Research Disclosure . 2020,第673期

机译：Metrology检测工具配方路由优化的吞吐量改进
3. Recipe Optimization for Post-CMP Defect Inspection [J] . Liang Shi, Leo Veltman, Brian Zhang, Semiconductor International . 2001,第8期

机译：CMP后缺陷检查的配方优化
4. Novel, Sem-Based Method for Wafer Inspection Recipe Optimization [C] . Stamper, Andrew, Chong, . 2007

机译：基于Sem的晶圆检测配方优化新方法
5. Optimized 3D Reconstruction for Infrastructure Inspection with Automated Structure from Motion and Machine Learning Methods [D] . Arce Munoz, Samuel. 2020

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6. Optimization of an Optical Inspection System Based on the Taguchi Method for Quantitative Analysis of Point-of-Care Testing [O] . Chia-Hsien Yeh, Zi-Qi Zhao, Pi-Lan Shen, 2014

机译：基于Taguchi方法的光学检查系统的现场护理定量分析的优化
7. Development of a Whole-Wafer, Macroscale Inspection Software Method for Semiconductor Wafer Analysis [O] . Tobin, K.W. 2003

机译：用于半导体晶圆分析的全晶圆宏观检测软件方法的开发
8. Development of a Whole-Wafer, Macroscale Inspection Software Method for Semiconductor Wafer Analysis [R] . 2003

机译：用于半导体晶圆分析的全晶圆宏观检测软件方法的开发

Novel, Sem-Based Method for Wafer Inspection Recipe Optimization

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