Non-Contact SPV-based Method for Advanced Ion Implant Process Control

机译：基于非接触式SPV的先进离子注入过程控制方法

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

Surface photo voltage (SPV) measurement has become an important semiconductor characterization tool due to the availability of commercial equipment and its non-contact nature. In this study, we discuss the application of the SPV technique for the control

机译：由于商用设备的可用性及其非接触性，表面光电压（SPV）测量已成为重要的半导体表征工具。在这项研究中，我们讨论了SPV技术在控制中的应用

著录项

来源
《Advanced Semiconductor Manufacturing Conference, 2007 IEEE/SEMI》|2007年|P.278-282|共5页
会议地点 StresaItaly
作者
Pennella; F.; Pianezza; P.; Tsidikovski; E.; Krzych; G.; Steeples; K.;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类
关键词
CMOS integrated circuits; annealing; ion implantation; photovoltaic effects; process control; semiconductor device manufacture; semiconductor device measurement; voltage measurement; QC Solutions ICT-300 system; Si; advanced ion implant process control; annealed wa;

机译：CMOS集成电路；退火;离子注入光伏效应过程控制;半导体器件制造；半导体器件测量；电压测量QC Solutions ICT-300系统； ;先进的离子注入工艺控制；退火水;

相似文献

外文文献
中文文献
专利

1. Damage control of ion implantation for advanced doping process by using in-situ temperature control [J] . Lee KyungWon, Ameen Michael Saied, Rubin Leonard Michael, Materials science in semiconductor processing . 2020,第1期

机译：使用原位温度控制损伤前进掺杂过程的离子植入控制
2. Obtaining complementary Lamb wave dispersion information by two signal processing methods on an all-optical non-contact configuration [J] . Borja Sorazu, Brian Culshaw, Graham Thursby Sensors and Actuators, A. Physical . 2014,第Null期

机译：通过两种信号处理方法在全光非接触配置下获得互补的兰姆波色散信息
3. Advanced Methods in Control and Signal Processing for Complex Marine Systems [J] . Karimi Hamid Reza, Zhang Hui, Ding Steven ISA Transactions . 2018,第期

机译：复杂海洋系统的控制和信号处理中的先进方法
4. Non-Contact SPV-based Method for Advanced Ion Implant Process Control [C] . Pennella, Fabrizio, Pianezza, . 2007

机译：基于非接触式SPV的先进离子注入过程控制方法
5. Advanced processing of gallium nitride and gallium nitride-based devices: Ultra-high temperature annealing and implantation incorporation. [D] . Yu, Haijiang. 2004

机译：氮化镓和氮化镓基器件的高级处理：超高温退火和注入结合。
6. Advanced monitoring and control of pharmaceutical production processes with Pichia pastoris by using Raman spectroscopy and multivariate calibration methods [O] . Jan‐Patrick Voss, Nina E. Mittelheuser, Roman Lemke, 2017

机译：利用拉曼光谱和多元校正方法对巴斯德毕赤酵母进行制药生产过程的高级监控
7. Quality Control Technology for Synthetic Fiber Manufacturing Process by Non-Contact Tension Meter. Part 2. Non-Contact Measuring System for Running Yarn Tension. [O] . Takashi Iwade, Masazumi Imae, Yukiko Shintani, 2000

机译：非接触式张紧仪的合成纤维制造工艺质量控制技术。第2部分。运行纱线张力的非接触式测量系统。

Non-Contact SPV-based Method for Advanced Ion Implant Process Control

摘要

著录项

相似文献

相关主题

期刊订阅