Three-dimension micro-nanofabrication with a femtosecond laser

摘要

The light is the ultimate energy source for the life on the earth and also it is with the help of light that we see and understand the world surrounding us. The energy quanta are called photons. In addition to illuminating, imaging, and speclroscopy, a typical example of the recent uses of photons in our daily life is optical communication. A more and more important new role that photons are playing is manufacturing, particularly in three-dimensional micro-nanofahrication on the basis of nonlinear photon-matter interactions. This article reports our recent progress in this research direction: the challenge to the spatial resolution of fabrication, and the utilization of the technology on nanophotonic and micro-nanomechanical devices.