Holographic fabrication of nano-optical devices using single reflective optical element

摘要

Here we present holographic fabrications of large area nano-optical device templates, including nano-antenna and photonic quasi-crystals using a single reflective optical element (ROE) through single beam and a single exposure process. These ROEs consist of several silicon wafers arranged with 5 or 6-fold symmetry, supported by two plastic platforms. By changing the polarization of the incident beam, various photonic quasi-crystal including spiral quasi-crystals can be fabricated using the 5-fold symmetrically arranged optical element. Using the single optical element with silicon chips arranged in 6-fold symmetry, large areas of nano gap arrays can be fabricated holographically. These nano-gaps and their shapes can be controlled through the phase delay of one laser beam. The nano gap arrays will be used for fabrication of nano-antennas arrays after metal depositions.