Holographic fabrication of nanoantenna templates through a single reflective optical element

摘要

In this paper, we present a single reflective optical element-based approach for the control of laser phase, polarization, and beam intensity for the holographic fabrication of nanoantenna templates. The single optical element can be designed and printed precisely by a 3D printer. The holographic fabrication is demonstrated in both negative and positive photoresists. The pattern fabricated is in agreement with simulations. The control of the nanogap size of nanoantennas is discussed in terms of the capabilities of the single-optical-element approach. (C) 2015 Optical Society of America