Abstract: Behavior of micromachined membrane deformable mirrors under continuous laser load has been investigated experimentally and theoretically. It was shown that load-induced variation of the membrane temperature and mechanical tension result in addition thermal deformation of the deformable mirror figure. Modeling the membrane tension and thermal deformation as functions of beam diameter, optical power and mirror design parameters, we found that the thermal resistance of the mirror substrate is critical for high- power operation. According to our estimations an optically- designed membrane mirror with 99.8 percent reflectivity can be safely loaded with up to 500W of optical power in a 10mm- diameter beam. This model was compared with experimental data obtained for micro-machined membrane deformable mirrors with five different types of reflective coatings loaded with up to 70W beam with power density of up to 20W/mm$+2$/. We also demonstrated operation of a multilayer membrane mirror in a stable resonator of a diode-pumped YAG:Nd laser with output power of up to 4.5W. !3
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机译：【摘要】研究了微加工膜变形镜在连续激光载荷下的行为。结果表明，由负载引起的膜温度和机械张力变化会导致可变形镜体产生额外的热变形。将膜片张力和热变形建模为光束直径，光功率和反射镜设计参数的函数，我们发现反射镜基板的热阻对于高功率操作至关重要。根据我们的估计，在直径为10mm的光束中，具有99.8％反射率的光学设计膜反射镜可以安全地加载高达500W的光功率。将该模型与获得的具有五种不同类型反射膜的微机械膜可变形镜的实验数据进行了比较，这些反射膜装有高达70W的光束，功率密度高达20W / mm $ + 2 $ /。我们还演示了在输出功率高达4.5W的二极管泵浦YAG：Nd激光器的稳定谐振器中多层膜镜的操作。 ！3
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