An analysis on the flexural vibration of cantilever beam of tapping mode scanning force microscopy

摘要

A cantilever beam model for dealing with the flexural vibration of the micro-mechanical system in the fully dynamic tapping mode scanning force microscopy (SFM) was presented. An analytical solution for the vibration differential equation of the cantilever beam with viscous damping and piece-wise linear interaction force was found by using the method of parameter transformation and mode expansion theorem. The examples of numerical simulation were given.