New High Stability Excimer Laser for LTPS Manufacturing

摘要

LTPS TFT backplanes for AM OLED displays havernadvantages in regard to reliability and performancerncompared to TFT backplanes based on amorphousrnsilicon. However, the requirements for homogeneousrnlaser crystallization during LTPS process are muchrnhigher than for LCD backplanes. Most important isrnthe energy stability of the laser source. In this paperrnwe describe a new excimer laser which meets thernrequirements of LTPS manufacturing process withrnhigh homogeneity.