High reproducible polysilicon thin film transistors involving very large area excimer crystallization

摘要

Low temperature thin film transistors (TFTs) were fabricated with the goal of flat panel display and large area electronic on glass substrate applications. The purpose is to obtain high performance uniformity on large area. A very large area excimer laser (5x5 cm~2 large beam) built by SOPRA Company is used to crystallize the TFTs channel region. a standard deviation of the mobility value of 7,6 percent is obtained using more than 200 TFTs of different size fabricated on a 3x3 cm_area.