Design, fabrication, and preliminary testing of a high-performance vibratory polysilicon ring gyroscope are presented. A high aspect-ratio p++/polysilicon trench-refill technology has been used to realize 35 um thick polysilicon ring structure with 0.9 mu m ring-to-electrode gap-spacing. The theoretical noise analysis of the ring gyroscope shows that by taking advantage of the submicron ring-to-electrode gap spacing, high aspect ratio thick polysilicon ring structure produced using deep dry-etching and high quality factor of polysilicon, vibrating ring gyroscopes with random walk as small as 0.4 deg/ h~(1/2) can be realized. 80 mu m thick trench-refilled polysilicon ring structures have shown a measured quality factor of 6000 under vacuum.
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