Z-Axis Micro Gyroscope with Optical Sensing Technique

摘要

This work introduces the design, fabrication, integration andrncharacterization, of a novel high-graded single axis tuning fork gyroscopern(TFG), based on optical detection. This is the first time that the opticalrnsensing approach is used for the in-plane sense mode response detection ofrna tactical grade micro gyroscope. The optical system is implemented in arnfully functional vacuum package with integrated electronics. We presentrnthe results of the rate-table performance study, and the sensor's mainrnfigures of merit. We show that the use of dual sensing significantlyrnsimplifies the silicon on insulator (SOI) fabrication process, allowing thernachievement of tactical grade performance, including angular randomrnwalk (ARW) of less than 0.2 [~0/√hr] and in-run bias instability (BI) of lessrnthan 2 [~0/hr]. We also show the behavior of various parameters such asrnscale factor and bias at various temperatures (in the range of -20 C°to 70rnC°).