Multifunctional Optical Coatings on Polymers Deposited by Pulse Magnetron Sputtering and Magnetron Enhanced PECVD

摘要

Reactive pulse magnetron sputtering processes are of increasing interest for the deposition ofhigh-precision optical coatings of high density, low roughness and shift-free environmental stability. SiO_2, Si_3N_4 and silicon oxynitride are attractive coating materials for interference filters produced by sputtering of a silicon target in a precisely controlled reactive gas mixture of oxygen and nitrogen.rnPolymer substrates are increasingly relevant for the application of optical coatings due to their mechanical and economical advantages. The opposing properties of hard and brittle metal oxide layers produced by sputtering on one hand and of the soft and elastic polymer substrates on the other hand may lead to adhesion failure and crack formation of the coatings.rnMagnetronPECVD(magPECVD)usingHMDSOasprecursor allows to deposit carbon containing films with polymer-like properties. Results show the suitability of these coatings as hard coatings or matching layers. Multifunctional layers on polymer substrates with antireflective and scratch resistant properties were deposited using a combined magPEC VD and sputter deposition process.