AXIAL–GAP ELECTROSTATIC WOBBLE MICROMOTOR

机译：轴向间隙静电微微型电动机

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The torque–versus–angle mechanical characteristic of an axial gap electrostatic wobble motor isrncomputed by an analytical method.

机译：轴向间隙静电摆式电动机的扭矩-角度-机械特性通过解析方法进行了计算。

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来源
《4th International symposium on advanced topics in electrical engineering (ATEE 2004)》|2004年|1-5|共5页
会议地点 Bucharest(RO);Bucharest(RO)
作者
Anca TOMESCU; Sorin ANTONIU; F.M.G. TOMESCU;
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Electrical Engineering Dept., POLITEHNICA University – BucharestrnR?zvan MACOVEIrnING – ROMANIA, Bucharest;

Electrical Engineering Dept., POLITEHNICA University – BucharestrnR?zvan MACOVEIrnING – ROMANIA, Bucharest;

Electrical Engineering Dept., POLITEHNICA University – BucharestrnR?zvan MACOVEIrnING – ROMANIA, Bucharest;

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1. An electrostatic lower stator axial-gap polysilicon wobble motor. II. Fabrication and performance [J] . Legtenberg R., Berenschot E. Journal of Microelectromechanical Systems . 1998,第1期

机译：静电下定子轴向间隙多晶硅摆动电机。二。制作和性能
2. An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling [J] . Legtenberg R., Berenschot E. Journal of Microelectromechanical Systems . 1998,第1期

机译：静电下定子轴向间隙多晶硅摆动电机。一，设计与造型
3. System level simulation of a double stator wobble electrostatic micromotor [J] . Endemano A., Desmulliez MPY., Dunnigan M. Sensors and Actuators, A. Physical . 2002,第3期

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4. The axial air gap wobble motor-an appropriate topology for magnetic micromotors [C] . Jungreis, A.M., Kelley, Industry Applications Conference, 1995. Thirtieth IAS Annual Meeting, IAS '95., Conference Record of the 1995 IEEE . 1995

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5. An investigation into the effect of the electrostatic actuation, non-ideal boundary conditions, and axial force on MEMS arches. [D] . Alkharabsheh, Sami A. 2011

机译：研究静电激励，非理想边界条件和轴向力对MEMS拱的影响。
6. Squeeze-Film Air Damping of a Five-Axis Electrostatic Bearing for Rotary Micromotors [O] . Shunyue Wang, Fengtian Han, Boqian Sun, 2017

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7. An electrostatic lower stator axial-gap polysilicon wobble motor part II: fabrication and performance [O] . Legtenberg Rob, Berenschot Erwin, Baar John van, 1998

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AXIAL–GAP ELECTROSTATIC WOBBLE MICROMOTOR

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