Improvement of deposition uniformity in Laminated Templates Electro-deposition

摘要

Laminated templates electro-deposition(LTE) is a small-sized metallic-structure fabrication technique based on template-patterned depositing．Avoiding locally excessive electroplating at the template edge area has been proved crucial to this method．To ireprove deposition unifofruity，auxiliary cathode and modulated doublepulse current were tried individually and assessed on their efiects and emciencies．By applying assisting cathode the deposition uniformity in plannar pattern depositing was significantly improved with an increased thickness ratio of edge to center for the plating sample．Pulse application， especially double-pulse Was studied mainly on the proportion between anodic duty circle and cathodic duty circle．Through a group of optimized parameters．including current density ranging 810A／dm2．anodic and cathodic duty circle of respectively 80％and 30％，frequency 300HZ，a bulk of copper parts．section size 20×20mm and 4-7mm thick were produced with a well depositing quality．