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Comparative analysis of two 3D integration implementations of a SAR processor

机译:SAR处理器的两种3D集成实现的比较分析

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When designing 3DICs there are five major issues that differ from 2D that must receive special attention: power delivery, thermal density, design for test, clock tree design and floorplanning. Power delivery in 3D must receive special attention as 3D designs have larger supply currents flowing through the package power delivery pins, along with a longer power delivery path than in comparable 2D system. Thermal density is an issue as 3D integrated chips will have more heat density and less capacity to remove heat than a comparable 2D chip. 3D clock tree distribution is much more difficult than in 2D because the most commonly used methodologies and design tools are geared towards 2D designs and process variation between the different tiers makes it harder to keep skew, jitter and power consumption down. Design for test is harder in 3D because 3D vias provide another point of failure and post fabrication repairs such as Focused Ion Beam are more difficult to perform in 3D. Finally, floorplanning is drastically different in 3D than in 2D, and the four aforementioned issues must all be taken into account during 3D floorplanning. In this paper, all five design issues are explored in the context of a high-resolution memory-on-logic Synthetic Aperture Radar (SAR) processor. The SAR processor is chosen specifically as it requires a significant amount of memory bandwidth that is best met with the high I/O bandwidth afforded by a 3D process. The issues are examined in the context of two implementations for two different 3D integration processes. The first implementation was done in MIT Lincoln Laboratory's 3D FDSOI 1.5 V three tier process and is currently in fabrication. The second design is currently in the design stage, and will be fabricated in two tiers of Chartered Semiconductor's 130 nm process 3D integrated with two tiers of high bandwidth DRAM using Tezzaron Semiconductor's vertical interconnection technology.
机译:设计3DIC时,有5个与2D不同的主要问题必须引起特别注意:供电,热密度,测试设计,时钟树设计和布局。与同类2D系统相比,3D设计中的3D设计具有更大的电源电流流经封装的功率输出引脚,并且具有更长的功率传输路径,因此必须特别注意。热密度是一个问题,因为3D集成芯片将比同类2D芯片具有更高的热密度和更小的散热能力。 3D时钟树的分配比2D困难得多,这是因为最常用的方法和设计工具是针对2D设计的,并且不同层之间的工艺差异使降低偏差,抖动和功耗的难度变得更大。在3D中测试设计更加困难,因为3D通孔提供了另一个故障点,并且在3D中执行聚焦后离子束之类的后期制造维修更加困难。最后,3D布局与2D布局完全不同,在3D布局中必须同时考虑上述四个问题。在本文中,所有五个设计问题都是在高分辨率的逻辑上存储合成孔径雷达(SAR)处理器的背景下进行的。特别选择SAR处理器,因为它需要大量的内存带宽,而3D处理所提供的高I / O带宽可以最好地满足此需求。在两个不同的3D集成过程的两个实现的上下文中检查了这些问题。第一次实施是在麻省理工学院林肯实验室的3D FDSOI 1.5 V三层工艺中完成的,目前正在制造中。第二种设计目前处于设计阶段,将使用特许半导体的垂直互连技术,将两层特许半导体的130 nm工艺3D与两层高带宽DRAM集成在一起进行制造。

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