DESIGN OF SURFACE METROLOGY SYSTEMS

摘要

This paper examines surface metrology from the perspective of axiomatic design. This perspective requires the design solution to maximize the independence of the functional requirements and to minimize the information content, i.e., to maximize the probability of success in fulfilling the functional requirements. The top level functional requirement in surface metrology is to provide the means to solve process and product design problems that involve surface textures. Measurement systems and texture characterization parameters can be selected by their ability to solve these problems, noting that quality control and assurance are process design problems. Some of these problems can be addressed using area-scale, and filling-scale analyses. An experimental design is presented and examples are given in diamond roll dressing of grinding wheels.