Micro-manufacturing Technology Using DUV Laser and NC

摘要

Combining deep UV laser with NC technology, complex 3D structures can be generated. For fused silica, the ablation depth and surface roughness are investigated after 157 nm laser processing. Under laser fluence of -4 J/cm2 and spot size of～ 35 μm, the ablation rate of fused silica is about 75 nm/pulse for 157 nm laser. A better ablation quality could be achieved under the repetition rate of -10 Hz. Assisted by numerical control; three-dimensional micro-structures are fabricated using 157 nm laser technique.