H2S gas sensing studies of CdXZn1−XO thin films synthesized at low temperature by advanced spray pyrolysis technique

摘要

Cadmium zinc oxide (CdZnO) thin films were deposited at low substrate temperature using advanced spray pyrolysis technique. Aqueous solution of cadmium acetate and zinc acetate were used as initial ingredients. The films were prepared by keeping optimized preparative parameters constant. Influence of variation of zinc in the `CdZnO' system on the structural, electrical and gas sensing properties of the films has been investigated. X-ray diffraction studies indicate polycrystalline nature of the films. Field emission scanning electron micrograph measurements reveal that the grain size decreases with increase in zinc content. It is found that films are sensitive to HS gas and maximum response is observed at the operating temperature of 300°C.