FRICTION AND WEAR PERFORMANCE OF UNBALANCED MAGNETRON SPUTTER-DEPOSITED DIAMOND-LIKE CARBON MULTILAYER COATINGS

摘要

Two types of diamond-like carbon (DLC) films with different microstructures were prepared by unbalanced magnetron sputtering, and the tribological properties of the nanoscaled DLC multilayer coatings consisting of alternating layers of graphite-like and amorphous-like microstructures were examined. The DLC microstructure was characterized by certain features of graphite-like clusters, in that some of them had onion-like structures. The films filled with the clusters were obtained in a condition with an incidence of high influx of energetic electrons, and the other films without apparent cluster structures were formed in a condition with ion bombardment controlled by negative bias voltage applied to substrates. Stacking each film layer-by-layer, the nanoscaled multilayered coatings showed superior tribological properties to individual single-layered films due to the combination of properties induced by the difference of microstructures.