Experiments on Detection of Vacuum Ultraviolet Radiation from Piezoelectric Transformer-based Excimer Lamp

摘要

A compact excimer lamp using a piezoelectric transformer (PT) has been constructed and studied in our laboratory. The excimer lamp is based on a dielectric barrier discharge (DBD) in a He/Xe mixture excited by the PT. As an preliminary experiment, a vacuum ultraviolet (VUV) from the lamp is detected by a phototube which has a spectral response range from 160 to 320 nm combined with a optical filter (UV-250) to cut off the shorter light wavelength than 200 nm. The results show that the excimer lamp radiates the VUV light between 160 to 200 nm. This is derived from 172 nm radiated from Xe_2~* which is transferred back to the ground state. Moreover, the VUV intensities are measured for different gas pressures and gap lengths to find an optimal driving condition of the excimer lamp.