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EXCIMER LAMP, EXCIMER LAMP UNIT, AND ULTRAVIOLET IRRADIATION DEVICE
EXCIMER LAMP, EXCIMER LAMP UNIT, AND ULTRAVIOLET IRRADIATION DEVICE
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机译:准分子灯,准分子灯单元和紫外线照射装置
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摘要
Provided are an excimer lamp and an excimer lamp unit in which a power supply can be connected to external electrodes (3, 4) of the excimer lamp (1) without using a lead wire. The excimer lamp has a configuration in which a pair of external electrodes are disposed on the upper and lower flat surfaces of a discharge tube (2) with a discharge space (2a) therein filled with discharge gas and a pair of connector terminals (8, 8) respectively connected to the external electrodes are disposed on the upper and lower flat surfaces of a connector section (2b) provided at the end of the discharge tube. The excimer lamp unit has a configuration including a lamp socket (7) in which a socket section (7a) for removably inserting thereinto and supporting the connector section of the excimer lamp is provided and a pair of multipoint contact members (13, 13) connected to the power supply of the excimer lamp are respectively disposed at positions within the socket section where the socket section contacts with the pair of connector terminals of the inserted connector section.
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