首页> 外文OA文献 >Atmospheric Pressure Deposition of Silica Thin Film by Photo-CVD Using Vacuum Ultraviolet Excimer Lamp

【2h】

Atmospheric Pressure Deposition of Silica Thin Film by Photo-CVD Using Vacuum Ultraviolet Excimer Lamp

机译：使用真空紫外线胶灯光 - CVD硅薄膜大气压沉积

代理获取

本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Yoshinari MAEZONO; Atsushi YOKOTANI; Kou KUROSAWA; Nobuyuki HISHINUMA; Hiromitsu MATSUNO;
展开▼
作者单位

展开▼
年度 2004
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. Characteristics of Thin Film Deposition by Photo-CVD Using a Xe{sub}2 Excimer Lamp [J] . JUNICHI MIYANO, ATSUSHI YOKOTANI, KOU KUROSAWA Electrical engineering in Japan . 2004,第4期

机译：Xe {sub} 2准分子灯的光化学气相沉积薄膜特性
2. Characterisation of ultraviolet annealed tantalum oxide films deposited by photo-CVD using 172 nm excimer lamp [J] . Jun-Ying Zhang, Vincent Dusastre, Ian W. Boyd Materials science in semiconductor processing . 2001,第1a3期

机译：使用172 nm准分子灯通过光CVD沉积的紫外退火氧化钽薄膜的表征
3. Analysis of the Photochemical Reaction on the Surface for Room Temperature Deposition of SiO_2 Thin Films by Photo-CVD using Vacuum Ultraviolet Light [J] . Atsushi YOKOTANI, Kouichi AMARI, Yoshinari MAEZONO, Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2005,第2期

机译：真空紫外光光化学气相沉积CVD_2薄膜表面光化学反应的分析
4. ATMOSPHERIC PRESSURE DEPOSITION OF SILICA THIN FILMS BY PHOTO-CVD USING VACUUM ULTRAVIOLET EXCIMER LAMP [C] . Yoshinari Maezono, Kouta Nishi, Atsushi Yokotani, Electrochemical Society Meeting and International Symposium on Chemical Vapor Deposition XVI and EUROCVD 14 Conference v.1; 20030427-20030502; Paris; FR . 2003

机译：真空紫外准分子灯的光化学气相沉积法沉积二氧化硅薄膜
5. Atmospheric Pressure Plasma Deposition of Thin Organic Films for Improved Adhesion in Polymer Composites [D] . Weeber, Dominic. 2019

机译：薄有机膜的大气压等离子体沉积，用于改进聚合物复合材料的粘附性
6. Vacuum Ultraviolet Field Emission Lamp Consisting of Neodymium Ion Doped Lutetium Fluoride Thin Film as Phosphor [O] . Masahiro Yanagihara, Takayuki Tsuji, Mohd Zamri Yusop, -1

机译：由掺钕离子氟化ute薄膜作为荧光粉的真空紫外场发射灯
7. Formation of Silica Coatings from Perhydropolysilazane Using Vacuum Ultraviolet Excimer Lamp [O] . Yasuhiro NAGANUMA, Satomi TANAKA, Chihiro KATO, 2004

机译：使用真空紫外线准分灯从水中聚硅氮烷形成二氧化硅涂层
8. Atmospheric Pressure Chemical Vapor Deposition and Jet Vapor Deposition of CdTe for High Efficiency Thin Film PV Devices [R] . Woods, L., Meyers, P. 2002

机译：高效薄膜光伏器件的常压化学气相沉积和CdTe的气相沉积

Atmospheric Pressure Deposition of Silica Thin Film by Photo-CVD Using Vacuum Ultraviolet Excimer Lamp

著录项

引文网络

相似文献

相关主题

期刊订阅